Attainable resolution of energy-selecting image using high-voltage electron microscope

被引：26

作者：

Kurata, H

Moriguchi, S

Isoda, S

Kobayashi, T

机构：

[1] Institute for Chemical Research, Kyoto University, Uji, Kyoto

来源：

JOURNAL OF ELECTRON MICROSCOPY | 1996年 / 45卷 / 01期

关键词：

energy-filtering transmission electron microscopy (EFTEM); high-voltage electron microscope; imaging filter; electron energy-loss spectroscopy (EELS); spatial resolution;

D O I：

10.1093/oxfordjournals.jmicro.a023416

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An imaging filter has been installed in a 1 MeV high-voltage electron microscope, Performances of the imaging filter system and some application results are presented, The energy resolution in the spectrum mode was 0.7 eV, The spatial resolution of inelastic scattering images was estimated theoretically by taking account of inelastic delocalization and the broadening due to objective lens aberrations, The energy-selecting imaging aimed at high-resolution observations has been examined for FeCl3 intercalated graphite compounds, The order of 1 nm resolution has been obtained experimentally, which is slightly worse than that expected by theoretical consideration.

引用

页码：79 / 84

页数：6

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