The effect of magnetic film structure on the inductance of a planar inductor

被引:10
作者
Inoue, T
Nishijima, K
Yatabe, S
Mizoguchi, T
Sato, T
机构
[1] Toshiba Corp, Semicond Div, Saiwai Ku, Kawasaki, Kanagawa 210, Japan
[2] Shinshu Univ, Dept Elect & Elect Engn, Wakasato, Nagano 380, Japan
关键词
a planar inductor; inductance; magnetic flux distribution; calculation;
D O I
10.1109/20.706552
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Magnetic nux density distribution for a planar magnetic film inductor was calculated as a function of magnetic film thickness; permeability, in-plane slit width and undulation amplitude and insulator thickness which was inserted between magnetic films. It is important to choose a proper combination of magnetic film thickness, permeability and insulator thickness to design inductance and superimposed de current characteristic of a planar inductor in which the magnetic film structure is multi-layered. Magnetic film slit width doesn't influence on inductance. It is important to decrease undulation amplitude of a magnetic film.
引用
收藏
页码:1372 / 1374
页数:3
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