Fabrication and characterization of microinductors for distributed power converters

被引：37

作者：

Brandon, EJ ^{[1
]}

Wesseling, E ^{[1
]}

White, V ^{[1
]}

Ramsey, C ^{[1
]}

Del Castillo, L ^{[1
]}

Lieneweg, U ^{[1
]}

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2003年 / 39卷 / 04期

关键词：

distributed power electronics; integrated passive components; microinductors;

D O I：

10.1109/TMAG.2003.812705

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Inductors play a key role in dc-dc converters, but few options exist for implementing on-chip inductors for highly miniaturized, monolithic power converters. Microinductors constructed by standard microelectronic fabrication techniques with magnetic films as the core material have been investigated during the past 20 years with mixed results. A 13-mm(2) microinductor based on a spiral geometry and having L = 3.2 muH and Q = 1.3 at 1 MHz is reported here. Key issues regarding microinductor design and performance are discussed.

引用

页码：2049 / 2056

页数：8

共 26 条

[1] Micromachined planar inductors on silicon wafers for MEMS applications [J].