Low-temperature deposition of ultrafine rutile TiO2 thin films by the hydrothermal method

被引:21
作者
Chen, QW [1 ]
Qian, YT [1 ]
Chen, ZY [1 ]
Jia, YB [1 ]
Zhou, GE [1 ]
Li, XG [1 ]
Zhang, YH [1 ]
机构
[1] UNIV SCI & TECHNOL CHINA,DEPT APPL CHEM,HEFEI 230026,PEOPLES R CHINA
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1996年 / 156卷 / 02期
关键词
D O I
10.1002/pssa.2211560216
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrafine (50 x 20 nm(2)) rutile TiO2 thin films (0.18 mu m) on alpha-Al2O3 substrates have,een prepared by hydrothermal treatment of a solution of a mixture of TiO42- (0.5 M) and HNO3(2.0 M) at low temperatures. Films prepared in the temperature range of 100 to 200 degrees C contain only the rutile phase and adhere well to the substrates. The acidity of the solution and the hydrothermal treatment time are the critical parameters determining the formation of pure rutile phase.
引用
收藏
页码:381 / 385
页数:5
相关论文
共 23 条
  • [1] KINETIC AND THERMODYNAMIC PROPERTIES OF NANOCRYSTALLINE MATERIALS
    AVERBACK, RS
    HAHN, H
    HOFLER, HJ
    LOGAS, JL
    SHEN, TC
    [J]. INTERFACES BETWEEN POLYMERS, METALS, AND CERAMICS, 1989, 153 : 3 - 12
  • [2] BACSA RR, 1993, APPL PHYS LETT, V63, P23
  • [3] HYDROTHERMAL PREPARATION OF HIGHLY ORIENTED POLYCRYSTALLINE ZNO THIN-FILMS
    CHEN, QW
    QIAN, YT
    CHEN, ZY
    ZHANG, YH
    [J]. MATERIALS LETTERS, 1995, 22 (1-2) : 93 - 95
  • [4] EFFECTS OF OXYGEN IN ION-BEAM SPUTTER DEPOSITION OF TITANIUM-OXIDES
    DEMIRYONT, H
    SITES, JR
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04): : 1457 - 1460
  • [5] PREPARATION AND CHARACTERIZATION OF COPPER(II) OXIDE THIN-FILMS GROWN BY A NOVEL SPRAY PYROLYSIS METHOD
    DESISTO, W
    SOSNOWSKI, M
    SMITH, F
    DELUCA, J
    KERSHAW, R
    DWIGHT, K
    WOLD, A
    [J]. MATERIALS RESEARCH BULLETIN, 1989, 24 (06) : 753 - 760
  • [6] PROCESSING AND PROPERTIES OF NANOPHASE OXIDES
    EASTMAN, JA
    LIAO, YX
    NARAYANASAMY, A
    SIEGEL, RW
    [J]. PROCESSING SCIENCE OF ADVANCED CERAMICS, 1989, 155 : 255 - 266
  • [7] Goodenough J., 1971, PROGR SOLID STATE CH, V5, P145, DOI DOI 10.1016/0079-6786(71)90018-5
  • [8] PROPERTIES OF RUTILE (TITANIUM DIOXIDE)
    GRANT, FA
    [J]. REVIEWS OF MODERN PHYSICS, 1959, 31 (03) : 646 - 674
  • [9] THE SURFACES OF METAL-OXIDES
    HENRICH, VE
    [J]. REPORTS ON PROGRESS IN PHYSICS, 1985, 48 (11) : 1481 - 1541
  • [10] HOVAL HJ, 1978, J ELECTROCHEM SOC, V125, P983