Pulsed laser deposited hard TiC, ZrC, HfC and TaC films on titanium: Hardness and an energy-dispersive X-ray diffraction study

被引：60

作者：

Ferro, D. ^{[2
]}

Rau, J. V. ^{[2
]}

Albertini, V. Rossi ^{[3
]}

Generosi, A. ^{[3
]}

Teghil, R. ^{[4
]}

Barinov, S. M. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Phys Chem Ceram, Moscow 119361, Russia

[2] Ist Studio Mat Nanostrutturati, CNR, I-00185 Rome, Italy

[3] Ist Struttura Mat, CNR, I-00133 Rome, Italy

[4] Univ Basilicata, I-85100 Potenza, Italy

来源：

SURFACE & COATINGS TECHNOLOGY | 2008年 / 202卷 / 08期

关键词：

thin films; carbides; pulse laser ablation deposition; X-ray diffraction; hardness;

D O I：

10.1016/j.surfcoat.2007.06.060

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 [材料科学与工程]; 080502 [材料学];

摘要：

Thin films of TiC, ZrC, HfC and TAC were pulsed laser ablation deposited onto sandblasted pure titanium substrate at a laser beam fluence of 3 J/cm(2). Deposition temperature was room temperature or 500 degrees C. The films were investigated by scanning electron microscopy, energy-dispersive X-ray diffraction (EDXD) and hardness measurements. The smooth and compact films of 200 to 600 nm thickness were obtained, consisting of tens nanometer particles. The rocking curve EDXD analysis revealed the films are textured. Intrinsic hardness of the films decreases generally with an increase in substrate temperature and in molecular weight of carbides. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：1455 / 1461

页数：7

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