Quantitative elastic-property measurements at the nanoscale with atomic force acoustic microscopy

被引：23

作者：

Hurley, DC ^{[1
]}

Kopycinska-Müller, M ^{[1
]}

Kos, AB ^{[1
]}

Geiss, RH ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Boulder, CO 80305 USA

来源：

ADVANCED ENGINEERING MATERIALS | 2005年 / 7卷 / 08期

关键词：

D O I：

10.1002/adem.200500039

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.

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页码：713 / 718

页数：6

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