Quantitative determination of contact stiffness using atomic force acoustic microscopy

被引:243
作者
Rabe, U [1 ]
Amelio, S [1 ]
Kester, E [1 ]
Scherer, V [1 ]
Hirsekorn, S [1 ]
Arnold, W [1 ]
机构
[1] Univ Saarbrucken, Fraunhofer Inst Nondestruct Testing IZFP, D-66123 Saarbrucken, Germany
关键词
acoustics; atomic force microscopy; beams; contact stiffness; flexural vibrations; ultrasonics; Young's modulus;
D O I
10.1016/S0041-624X(99)00207-3
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Atomic force acoustic microscopy is a near-field technique which combines the ability of ultrasonics to image elastic properties with the high lateral resolution of scanning probe microscopes. We present a technique to measure the contact stiffness and the Young's modulus of sample surfaces quantitatively, with a resolution of approximately 20 nm, exploiting the contact resonance frequencies of standard cantilevers used in atomic force microscopy. The Young's modulus of nanocrystalline ferrite films has been measured as a function of oxidation temperature. Furthermore, images showing the domain structure of piezoelectric lead zirconate titanate ceramics have been taken. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:430 / 437
页数:8
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