Use of a two-dimensional array illumination in laser machining for improving throughput

We report a laser-machining method that uses a two-dimensional array of beam spots to attain a high throughput. A phase grating is used as an array generator. Multiple spots lined up parallel as well as perpendicular to the machining direction are beamed on a workpiece atop a table, leaving marks. The mark size and spacing and the table speed are mutually related in a way that allows the said marks to overlap each other to process the workpiece. Theoretically, the use of m spots, compared to a single spot, in the machining direction enables an m-time increase in throughput. To corroborate the idea experimentally, we cut a photoconductive film with a pair of spots and found cutting throughput to be doubled.