SMART:: An aberration-corrected XPEEM/LEEM with energy filter

被引:74
作者
Wichtendahl, R
Fink, R
Kuhlenbeck, H
Preikszas, D
Rose, H
Spehr, R
Hartel, P
Engel, W
Schlögl, R
Freund, HJ
Bradshaw, AM
Lilienkamp, G
Schmidt, T
Bauer, E
Benner, G
Umbach, E
机构
[1] Univ Wurzburg, D-97074 Wurzburg, Germany
[2] Max Planck Gesell, Fritz Haber Inst, D-14195 Berlin, Germany
[3] TH Darmstadt, D-64289 Darmstadt, Germany
[4] Tech Univ Clausthal, D-38678 Clausthal Zellerfeld, Germany
[5] Arizona State Univ, Dept Phys & Astron, Tempe, AZ 85287 USA
[6] LEO, LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany
关键词
D O I
10.1142/S0218625X98001584
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A new UHV spectroscopic X-ray photoelectron emission and low energy electron microscope is presently under construction for the installation at the PM-6 soft X-ray undulator beamline at BESSY II. Using a combination of a sophisticated magnetic beam splitter and an electrostatic tetrode mirror, the spherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allows high spectral resolution (Delta E = 0.1 eV) in the photoemission modes and background suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5 Angstrom; a realistic goal is about 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.
引用
收藏
页码:1249 / 1256
页数:8
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