Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries

被引：22

作者：

Duan, Xuexin ^{[1
]}

Zhao, Yiping ^{[1
,2
]}

Berenschot, Erwin ^{[2
]}

Tas, Niels R. ^{[2
]}

Reinhoudt, David N. ^{[1
]}

Huskens, Jurriaan ^{[1
]}

机构：

[1] Univ Twente, Mol Nanofabricat Grp, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

[2] Univ Twente, Transducers Sci & Technol Grp, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

来源：

ADVANCED FUNCTIONAL MATERIALS | 2010年 / 20卷 / 15期

关键词：

HIGH-RESOLUTION; BEAM LITHOGRAPHY; SOFT; MICROSTRUCTURES; MONOLAYERS; POLYMERS; DEVICES;

D O I：

10.1002/adfm.201000492

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Within the past years there has been much effort in developing and improving new techniques for the nanoscale patterning of functional materials used in promising applications like nano(opto)electronics. Here a high-resolution soft lithography technique-nanomolding in capillaries (NAMIC)-is demonstrated. Composite PDMS stamps with sub-100 nm features are fabricated by nanoimprint lithography to yield nanomolds for NAMIC. NAMIC is used to pattern different functional materials such as fluorescent dyes, proteins, nanoparticles, thermoplastic polymers, and conductive polymers at the nanometer scale over large areas. These results show that NAMIC is a simple, versatile, low-cost, and high-throughput nanopatterning tool.

引用

页码：2519 / 2526

页数：8

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