Nanoparticle films made by gas phase synthesis:: Comparison of various techniques, and sensor applications

被引：4

作者：

Heszler, P ^{[1
]}

Reyes, LF ^{[1
]}

Hoel, A ^{[1
]}

Landström, L ^{[1
]}

Lantto, V ^{[1
]}

Granqvist, CG ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden

来源：

SMART STRUCTURES AND MATERIALS 2003: SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY | 2003年 / 5055卷

关键词：

nanoparticles; gas deposition; LCVD; laser ablation; size distribution; WO3; sensor;

D O I：

10.1117/12.497440

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO3) - are presented and compared. WO3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO3 nanoparticle film were detected as it was exposed to test gases (H2S, NO2, and CO).

引用

页码：106 / 119

页数：14

共 42 条

[1] Preparation of iron carbide and iron nanoparticles by laser-induced gas phase pyrolysis [J].

Alexandrescu, R ;

Cojocaru, S ;

Crunteanu, A ;

Morjan, I ;

Voicu, I ;

Diamandescu, L ;

Vasiliu, F ;

Huisken, F ;

Kohn, B .

JOURNAL DE PHYSIQUE IV, 1999, 9 (P8) :537-544

[2] Preparation of carbon nitride fine powder by laser induced gas-phase reactions [J].

Alexandrescu, R ;

Huisken, F ;

Pugna, G ;

Crunteanu, A ;

Petcu, S ;

Cojocaru, S ;

Cireasa, R ;

Morjan, I .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 65 (02) :207-213

[3] Synthesis of TiC and SiC/TiC nanocrystalline powders by gas-phase laser-induced reaction [J].

Alexandrescu, R ;

Borsella, E ;

Botti, S ;

Cesile, MC ;

Martelli, S ;

Giorgi, R ;

Turtu, S ;

Zappa, G .

JOURNAL OF MATERIALS SCIENCE, 1997, 32 (21) :5629-5635

[4] Thermochemistry of combustion reaction in Al-Ti-C system during mechanical alloying [J].

Ye, LL ;

Liu, ZG ;

Li, SD ;

Quan, MX ;

Hu, ZQ .

JOURNAL OF MATERIALS RESEARCH, 1997, 12 (03) :616-618

[5] MICROSTRUCTURAL EFFECTS IN WO3 GAS-SENSING FILMS [J].

ANTONIK, MD ;

SCHNEIDER, JE ;

WITTMAN, EL ;

SNOW, K ;

VETELINO, JF .

THIN SOLID FILMS, 1995, 256 (1-2) :247-252

[6] GIANT MAGNETORESISTANCE IN HETEROGENEOUS CU-CO ALLOYS [J].

BERKOWITZ, AE ;

MITCHELL, JR ;

CAREY, MJ ;

YOUNG, AP ;

ZHANG, S ;

SPADA, FE ;

PARKER, FT ;

HUTTEN, A ;

THOMAS, G .

PHYSICAL REVIEW LETTERS, 1992, 68 (25) :3745-3748

[7] COMPOSITE SI/C/N POWDER PRODUCTION BY LASER-INDUCED GAS-PHASE REACTIONS [J].

BORSELLA, E ;

BOTTI, S ;

FANTONI, R ;

ALEXANDRESCU, R ;

MORJAN, I ;

POPESCU, C ;

DIKONIMOSMAKRIS, T ;

GIORGI, R ;

ENZO, S .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (08) :2257-2268

[8] X-ray diffraction investigation on MoS2 nanoparticles produced by CO2 laser assisted synthesis [J].

Borsella, E ;

Botti, S ;

Cesile, MC ;

Martelli, S ;

Nesterenko, A .

EPDIC 5, PTS 1 AND 2, 1998, 278-2 :636-641

[9] Observation of aerosol formation during laser ablation using a low-pressure differential mobility analyzer [J].

Camata, RP ;

Hirasawa, M ;

Okuyama, K ;

Takeuchi, K .

JOURNAL OF AEROSOL SCIENCE, 2000, 31 (04) :391-401

[10] Challenges in nanomaterials design [J].

Edelstein, AS ;

Murday, JS ;

Rath, BB .

PROGRESS IN MATERIALS SCIENCE, 1997, 42 (1-4) :5-21

← 1 2 3 4 5 →