COMPOSITE SI/C/N POWDER PRODUCTION BY LASER-INDUCED GAS-PHASE REACTIONS

被引:60
作者
BORSELLA, E
BOTTI, S
FANTONI, R
ALEXANDRESCU, R
MORJAN, I
POPESCU, C
DIKONIMOSMAKRIS, T
GIORGI, R
ENZO, S
机构
[1] RES CTR QUAL & ENVIRONM PROTECT,BUCHAREST,ROMANIA
[2] ENTE NAZL ENERGIA ATOM,CTR RIC ENERGIA CASACCIA,DIPARTIMENTO PROC CHIM MAT NON MET & RELAT TRAT,ROME,ITALY
[3] UNIV VENICE,DIPARTIMENTO CHIM FIS,VENICE,ITALY
[4] INST ATOM PHYS,DEPT LASER,BUCHAREST,ROMANIA
关键词
D O I
10.1557/JMR.1992.2257
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrafine amorphous Si/C/N ternary powders have been prepared in a CO2 laser assisted process. We demonstrate the possibility to drive the C/N ratio in the powder by properly choosing the experimental conditions and the gaseous reactant ratio in the initial mixture containing silane, dimethylamine, and ammonia. A kinetic model that accounts for reaching the equilibrium between the gaseous reaction intermediates and the solid products is proposed.
引用
收藏
页码:2257 / 2268
页数:12
相关论文
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