Silicon micromachining - Sensors to systems

[1] SILICON FUSION BONDING FOR FABRICATION OF SENSORS, ACTUATORS AND MICROSTRUCTURES [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 23 (1-3) : 919 - 926

[2] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[3] ADVANCES IN THE SYNTHESIS OF OLIGONUCLEOTIDES BY THE PHOSPHORAMIDITE APPROACH [J]. TETRAHEDRON, 1992, 48 (12) : 2223 - 2311

[4] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3

[5] STEREO LASER MICROMACHINING OF SILICON [J]. APPLIED PHYSICS LETTERS, 1992, 61 (06) : 708 - 710

[6] ETHYLENE DIAMINE-PYROCATECHOL-WATER MIXTURE SHOWS ETCHING ANOMALY IN BORON-DOPED SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (02) : 401 - &

[7] BRYZEK J, 1994, IEEE SPECTRUM MAY, P20

[8] DOYLE LE, 1985, MANUFACTURING PROCES

[9] EHRFELD W, 1988, IEEE SOL STAT SENS A, P1

[10] ERICKSON KA, 1993, CLIN CHEM, V39, P283

[1] SILICON FUSION BONDING FOR FABRICATION OF SENSORS, ACTUATORS AND MICROSTRUCTURES [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 23 (1-3) : 919 - 926

[2] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[3] ADVANCES IN THE SYNTHESIS OF OLIGONUCLEOTIDES BY THE PHOSPHORAMIDITE APPROACH [J]. TETRAHEDRON, 1992, 48 (12) : 2223 - 2311

[4] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3

[5] STEREO LASER MICROMACHINING OF SILICON [J]. APPLIED PHYSICS LETTERS, 1992, 61 (06) : 708 - 710

[6] ETHYLENE DIAMINE-PYROCATECHOL-WATER MIXTURE SHOWS ETCHING ANOMALY IN BORON-DOPED SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (02) : 401 - &

[7] BRYZEK J, 1994, IEEE SPECTRUM MAY, P20

[8] DOYLE LE, 1985, MANUFACTURING PROCES

[9] EHRFELD W, 1988, IEEE SOL STAT SENS A, P1

[10] ERICKSON KA, 1993, CLIN CHEM, V39, P283