Compact evanescent optical switch and attenuator with electromechanical actuation

被引：25

作者：

Chollet, F ^{[1
]}

de Labachelerie, M

Fujita, H

机构：

[1] Natl Univ Singapore, IMRE, Singapore 119260, Singapore

[2] Univ Tokyo, IIS, CNRS, LIMMS, Tokyo 106, Japan

[3] Univ Franche Comte, IMFC, CNRS, LPMO, F-25030 Besancon, France

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 1999年 / 5卷 / 01期

基金：

日本学术振兴会;

关键词：

electrostatic actuator; MEMS; optical attenuator; optical switch;

D O I：

10.1109/2944.748105

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the design and the realization of an out-of-plane bending structure supporting a waveguide that is used as an optical attenuator and an optical switch. Both devices are based on evanescent field interaction induced by spatial confinement either between two waveguides or between one waveguide and an absorbing medium. The attenuator exhibits typical attenuation of 65 dB/cm, Even if the bad quality of the waveguide has prevented the correct operation of the switch, we show that the attenuation figure establishes the feasibility of a compact evanescent optical coupler with mechanical drive featuring a total length below 1 mm.

引用

页码：52 / 59

页数：8

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