Carbon spheres generated in 'dusty plasmas'

被引：29

作者：

Chen, GY ^{[1
]}

Stolojan, V

Silva, SRP

Herman, H

Haq, S

机构：

[1] Univ Surrey, Dept Elect Engn, Adv Technol Inst, Surrey GU2 7XH, England

[2] BAE SYST, Ctr Adv Technol, Bristol BS34 7QW, Avon, England

来源：

CARBON | 2005年 / 43卷 / 04期

关键词：

plasma deposition; Raman spectroscopy;

D O I：

10.1016/j.carbon.2004.10.037

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The formation of spherical hydrogenated amorphous carbon (a-C:H) particulates generated in a radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) system is reported. These particulates appear as a white powder-no other contaminants appear to be present. electron energy loss spectroscopy (EELS) shows characteristics typical of a-C:H with a reduced plasmon energy due to hydrogen incorporation. Raman spectroscopy however revealed a 1456cm(-1) line which was previously not reported on a-C:H films deposited using similar processes. infrared (IR) spectroscopy shows that these spheres are mainly partially oxidised, methyl-rich, aliphatic hydrocarbons. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：704 / 708

页数：5

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