共 12 条
- [1] High frequency microelectromechanical IF filters [J]. IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, : 773 - 776
- [2] HSU WT, 1998, IN PRESS P 1998 IEEE
- [5] Nguyen CTC, 1998, AEROSP CONF PROC, P445, DOI 10.1109/AERO.1998.686943
- [6] NGUYEN CTC, 1999, IN PRESS IEEE J APR
- [7] NGUYEN CTC, 1998, P SPIE MICR MICR SAN, P24
- [8] LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES [J]. SENSORS AND ACTUATORS, 1989, 20 (1-2): : 25 - 32
- [9] Thomson W. T., 1981, THEORY VIBRATION APP
- [10] Timoshenko S., 1940, Strength of materials, Part I: elementary theory and problems, V2