VHF free-free beam high-Q micromechanical resonators

被引：53

作者：

Wang, K ^{[1
]}

Yu, YL ^{[1
]}

Wong, AC ^{[1
]}

Nguyen, CTC ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ctr Integrated Microsyst, Ann Arbor, MI 48109 USA

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746871

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.

引用

页码：453 / 458

页数：6

共 12 条

[1] High frequency microelectromechanical IF filters
Bannon, FD
Clark, JR
Nguyen, CTC
[J]. IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, : 773 - 776
[2] HSU WT, 1998, IN PRESS P 1998 IEEE
[3] RESONANT GATE TRANSISTOR
NATHANSON, HC
NEWELL, WE
WICKSTROM, RA
DAVIS, JR
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (03) : 117 - +
[4] MINIATURIZATION OF TUNING FORKS
NEWELL, WE
[J]. SCIENCE, 1968, 161 (3848) : 1320 - +
[5] Nguyen CTC, 1998, AEROSP CONF PROC, P445, DOI 10.1109/AERO.1998.686943
[6] NGUYEN CTC, 1999, IN PRESS IEEE J APR
[7] NGUYEN CTC, 1998, P SPIE MICR MICR SAN, P24
[8] LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES
TANG, WC
NGUYEN, TCH
HOWE, RT
[J]. SENSORS AND ACTUATORS, 1989, 20 (1-2): : 25 - 32
[9] Thomson W. T., 1981, THEORY VIBRATION APP
[10] Timoshenko S., 1940, Strength of materials, Part I: elementary theory and problems, V2

← 1 2 →