VHF free-free beam high-Q micromechanical resonators

被引:53
作者
Wang, K [1 ]
Yu, YL [1 ]
Wong, AC [1 ]
Nguyen, CTC [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ctr Integrated Microsyst, Ann Arbor, MI 48109 USA
来源
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年
关键词
D O I
10.1109/MEMSYS.1999.746871
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.
引用
收藏
页码:453 / 458
页数:6
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