Dielectric properties and high tunability of (100)-oriented Ba(Zr0.2Ti0.8)O3 thin films prepared by pulsed laser deposition

被引：27

作者：

Zhang, W

Tang, XG

Wong, KH

Chan, HLW

机构：

[1] Guangdong Univ Technol, Sch Phys & Optoelect Engn, Guangzhou 510090, Peoples R China

[2] Hong Kong Polytech Univ, Dept Appl Phys, Kowloon, Hong Kong, Peoples R China

[3] Hong Kong Polytech Univ, Mat Res Ctr, Kowloon, Hong Kong, Peoples R China

来源：

SCRIPTA MATERIALIA | 2006年 / 54卷 / 02期

关键词：

pulsed laser deposition; dielectrics; thin films; perovskites; tunability;

D O I：

10.1016/j.scriptamat.2005.09.034

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Highly (100)-oriented Ba(Zr0.2Ti0.8)O-3 (BZT) film with nano-sized grains of 30-50 nm is deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition. The dielectric constant and loss tan delta at a frequency of 1 MHz are 792 and 0.020, respectively. The tunability is 69% at 187.5 kV/cm. (c) 2005 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

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页码：197 / 200

页数：4

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