Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: Application to benzocyclobutene films

被引：19

作者：

Guo, SW ^{[1
]}

Gustafsson, G ^{[1
]}

Hagel, OJ ^{[1
]}

Arwin, H ^{[1
]}

机构：

[1] IND MICROELECTR CTR,S-58330 LINKOPING,SWEDEN

来源：

APPLIED OPTICS | 1996年 / 35卷 / 10期

关键词：

spectroscopic ellipsometry; benzocyclobutene; refractive-index determination;

D O I：

10.1364/AO.35.001693

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An analysis procedure for evaluating the refractive index and the thickness of 5-10-mu m-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in psi and Delta with respect to the refractive index and the thickness of the films are also discussed. (C) 1996 Optical Society of America

引用

页码：1693 / 1699

页数：7

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