PARAMETER-CORRELATION AND COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY

被引：87

作者：

IBRAHIM, MM

BASHARA, NM

机构：

来源：

关键词：

D O I：

10.1364/JOSA.61.001622

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1622 / &

共 13 条

[1]

ARCHER RJ, 1968, ELLIPSOMETRY

BARTELL, LS ;

CHURCHIL.D .

[3]

BARTELL LS, 1962, J PHYS CHEM, V66, P2719

BURGE, DK ;

BENNETT, HE .

[5] MULTIPLE-ANGLE-OF-INCIDENCE ELLIPSOMETRY OF VERY THIN FILMS [J].

JOHNSON, JA ;

BASHARA, NM .

[6]

KOWALK J, 1968, METHODS UNCONSTRAINE

[7]

Marquardt D. W., 1963, J SOC IND APPL MATH, V2, P431

[8]

MCCRACKIN FL, 1964, 256 NBS MISC PUBL, P61

[9] NUMERICAL TECHNIQUES FOR ANALYSIS OF LOSSY FILMS [J].

OLDHAM, WG .

[10] OPTICAL CONSTANTS OF SILICON IN THE REGION 1 TO 10 EV [J].

PHILIPP, HR ;

TAFT, EA .

PHYSICAL REVIEW, 1960, 120 (01) :37-38