NUMERICAL TECHNIQUES FOR ANALYSIS OF LOSSY FILMS

被引：55

作者：

OLDHAM, WG

机构：

[1] Department of Electrical Engineering and Computer Sciences, Electronics Research Laboratory, University of California, Berkeley

来源：

SURFACE SCIENCE | 1969年 / 16卷

关键词：

D O I：

10.1016/0039-6028(69)90008-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Two fast and simple algorithms for reducing ellipsometric data are described. The first determines the complex film index given the film thickness and data from a single measurement. The second determines the film index and thickness(es) from two independent measurements. © 1969.

引用

页码：97 / &

共 4 条

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J].

ARCHER, RJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) :970-&

[2] ELLIPSOMETER STUDY OF ANOMALOUS ABSORPTION IN VERY THIN DIELECTRIC FILMS ON EVAPORATED METALS [J].

BASHARA, NM ;

PETERSON, DW .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1966, 56 (10) :1320-&

[3] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

[4]

MCCRACKIN FL, 1964, 256 NBS MISC PUBL, P61

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