Specular and diffuse reflectivity from thin films containing misfit dislocations

被引:40
作者
Miceli, PF [1 ]
Weatherwax, J [1 ]
Krentsel, T [1 ]
Palmstrom, CJ [1 ]
机构
[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455
来源
PHYSICA B | 1996年 / 221卷 / 1-4期
关键词
D O I
10.1016/0921-4526(95)00930-2
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We discuss the effects of misfit dislocations on the specular and diffuse scattering observed in X-ray reflectivity at the Bragg reflections of thin films. Using experimental results from ErAs/GaAs(0 0 1), it is shown that an interfacial displacement-difference correlation function can be used to model the scattering from misfit dislocations. We find that the diffuse scattering is correlation-length-limited for weak disorder whereas it has a rotational character for strong disorder. It is suggested that the correlation length arises from the elastic image field of a misfit dislocation.
引用
收藏
页码:230 / 234
页数:5
相关论文
共 19 条
  • [1] Bacon G. E., 1975, NEUTRON DIFFRACTION
  • [2] HIGH-RESOLUTION X-RAY-SCATTERING STUDY OF THE STRUCTURE OF NIOBIUM THIN-FILMS ON SAPPHIRE
    GIBAUD, A
    COWLEY, RA
    MCMORROW, DF
    WARD, RCC
    WELLS, MR
    [J]. PHYSICAL REVIEW B, 1993, 48 (19): : 14463 - 14471
  • [3] GIBAUD A, UNPUB
  • [4] Hirth J. P., 1982, THEORY DISLOCATIONS
  • [5] X-RAY DOUBLE AND TRIPLE-CRYSTAL DIFFRACTOMETRY OF MOSAIC STRUCTURE IN HETEROEPITAXIAL LAYERS
    HOLY, V
    KUBENA, J
    ABRAMOF, E
    LISCHKA, K
    PESEK, A
    KOPPENSTEINER, E
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (03) : 1736 - 1743
  • [6] Krivoglaz M. A., 1969, Theory of X-ray and Thermal Neutron Scattering by Real Crystals
  • [7] Miceli P. F., 1993, Semiconductor interfaces, microstructures and devices: properties and applications, P87
  • [8] GROWTH-MORPHOLOGY OF EPITAXIAL ERAS/GAAS BY X-RAY EXTENDED RANGE SPECULAR REFLECTIVITY
    MICELI, PF
    PALMSTROM, CJ
    MOYERS, KW
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (17) : 2060 - 2062
  • [9] MICELI PF, 1991, MATER RES SOC SYMP P, V202, P579
  • [10] X-RAY-SCATTERING STUDY OF LATTICE-RELAXATION IN ERAS EPITAXIAL LAYERS ON GAAS
    MICELI, PF
    PALMSTROM, CJ
    MOYERS, KW
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (15) : 1602 - 1604