Sensing characteristics of hematite and barium oxide doped hematite films towards ozone and nitrogen dioxide

被引：12

作者：

Debliquy, M. ^{[1
]}

Baroni, C. ^{[2
]}

Boudiba, A. ^{[1
]}

Tulliani, J. -M. ^{[2
]}

Olivier, M. ^{[1
]}

Zhang, C. ^{[1
]}

机构：

[1] Univ Mons, Serv Sci Mat, Fac Polytech, B-7000 Mons, Belgium

[2] Politecn Torino, Dept Mat Sci & Chem Engn, Turin, Italy

来源：

EUROSENSORS XXV | 2011年 / 25卷

关键词：

iron oxide; gas sensor; sputtering; O-3; NO2; NO2; DETECTION;

D O I：

10.1016/j.proeng.2011.12.054

中图分类号：

TH7 [仪器、仪表];

学科分类号：

080401 [精密仪器及机械];

摘要：

Hematite (alpha-Fe2O3) and barium oxide doped hematite (BaO-Fe2O3) thin films were investigated as ozone (O-3) and nitrogen dioxide (NO2) sensing materials. Fe2O3 and BaO-Fe2O3 films were deposited by radio-frequency sputtering using pure Fe2O3, and 1-2% BaO doped Fe2O3 targets. The 700 degrees C (1 hour) annealed films showed significant responses to O-3 at temperatures ranging from 150 degrees C to 300 degrees C. Although, hematite is an n-type semiconductor, the Fe2O3 and BaO-Fe2O3 films exhibit p-type behavior to O-3 and n-type behavior to NO2 at the studied concentration ranges in this work. The response to oxidizing gases is not strictly an increase in resistance due to a conversion from n-type to p-type depending on gas concentrations. This effect is more visible with increasing Ba concentration. (C) 2011 Published by Elsevier Ltd.

引用

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