Fabrication of a pencil-shaped fiber probe for near-field optics by selective chemical etching

被引:89
作者
Mononobe, S [1 ]
Ohtsu, M [1 ]
机构
[1] TOKYO INST TECHNOL,MIDORI KU,YOKOHAMA,KANAGAWA 226,JAPAN
关键词
D O I
10.1109/50.541212
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose a novel method by chemical etching using hydrofluoric (HF) acid and a buffered HF solution (BHF) to fabricate a pencil-shaped fiber probe for near-field optics, We succeeded in producing such probes with high reproducibility using a dispersion-compensating fiber having the high GeO2 doped core, The method involves tapering of the cladding, then sharpening of the core, The fabricated probe has a conical tip with a cone angle of 20 degrees and an apex diameter of less than 10 nm.
引用
收藏
页码:2231 / 2235
页数:5
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