Light induced instabilities in amorphous indium-gallium-zinc-oxide thin-film transistors

被引:193
作者
Chowdhury, Md Delwar Hossain [1 ]
Migliorato, Piero [1 ,2 ]
Jang, Jin [1 ]
机构
[1] Kyung Hee Univ, Adv Display Res Ctr, Dept Informat Display, Seoul 130701, South Korea
[2] Univ Cambridge, Elect Engn Div, Dept Engn, Cambridge CB3 0FA, England
关键词
D O I
10.1063/1.3503971
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effect of exposure to ultraviolet radiation on the characteristics of amorphous indium-gallium-zinc-oxide thin-film transistors (TFTs) fabricated by sputtering is investigated. After illumination with 1.5 mW cm(-2) of 365 nm radiation, in the absence of any bias stress, a persistent negative shift in the characteristics is observed in the dark. The magnitude of the shift increases with exposure time, saturating after about 10 min. Under these conditions the subthreshold exhibits a rigid shift of around 3.6 V and 7.5 V for TFTs with an active layer thickness of 20 nm and 50 nm, respectively. The shift in the dark increases (decreases) when a negative (positive) bias stress is applied under illumination. The instability behavior caused by exposure to light, in the absence of any bias stress, can be explained on the basis of ionization of neutral oxygen vacancies. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3503971]
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页数:3
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