RF magnetron sputtered ZnO:Al thin films on glass substrates:: A study of damp heat stability on their optical and electrical properties

被引：80

作者：

Lin, Wei

Ma, Ruixin ^{[1
]}

Xue, Jianshe

Kang, Bo

机构：

[1] Univ Sci & Technol Beijing, Dept Non Ferrous Met, Beijing 100083, Peoples R China

[2] BOE Technol Grp Co Ltd, Beijing 100016, Peoples R China

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2007年 / 91卷 / 20期

关键词：

solar cells; ZnO : Al; thin films; CIGS; damp heat stability;

D O I：

10.1016/j.solmat.2007.07.008

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

ZnO:AI thin films were deposited on glass substrates by RF magnetron sputtering from a powder compacted ceramic target. Structural, electrical and optical properties of the films with different thickness were characterized. The damp heat stability of ZnO:Al thin film was investigated for its application in thin-film solar cells. After the 1000 h damp heat treatment in harsh conditions of 85% relative humidity at 85 degrees C for all samples, a degradation of electrical properties was observed, while the transmissions of the films were almost unchanged. Thick films with a relative large grain size could form compact structure to resist the corrosion by oxygen and water molecules. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：1902 / 1905

页数：4

共 14 条

[1] The structural and electrical properties of Ga-doped ZnO and Ga, B-codoped ZnO thin films: The effects of additional boron impurity [J].