共 12 条
[1]
AOYAMA H, P 1993 SPR M JSPE, P907
[2]
FUKUDA T, P 12 JRSJ, P95
[3]
Two-dimensional micro optical scanner excited by PZT thin film microactuator
[J].
OPTOELECTRONIC MATERIALS AND DEVICES,
1998, 3419
:227-235
[4]
HAYASHI I, 1995, P AIMAC S, P30
[5]
HIRAYAMA T, P 74 ANN M JSME, P295
[6]
HONDA T, 1996, T JSAM, V20, P541
[7]
MIYASHITA N, 1994, P INT MOV ROB S JSME, P43
[8]
SHIBAGAKI S, 1993, THESIS TIT
[9]
SUZUKI M, 1994, T JSPE, V60, P101
[10]
TAGUCHI K, 1996, T JRSJ, V14, P150