Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

被引:76
作者
Wang, Y [1 ]
Olthoff, JK [1 ]
机构
[1] Natl Inst Stand & Technol, Div Elect, Elect & Elect Engn Lab, Gaithersburg, MD 20899 USA
关键词
D O I
10.1063/1.370138
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure argon, nitrogen, oxygen, and chlorine, and in mixtures of argon with N-2,O-2, and Cl-2. Measured current densities are significantly greater for pure argon and for mixtures containing argon than for pure N-2,O-2, and Cl-2. For all three molecular gases, the ratio of molecular ions to the fragment ions decreases when argon is added to the molecular gas discharges. A possible destruction mechanism for the molecular ions involving metastable argon is discussed. (C) 1999 American Institute of Physics. [S0021-8979(99)00309-6].
引用
收藏
页码:6358 / 6365
页数:8
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