Electrostatic spray deposited zinc oxide films for gas sensor applications

被引：129

作者：

Ghimbeu, Camelia Matei

Schoonman, Joop

Lumbreras, Martine

Siadat, Maryam

机构：

[1] Univ Paul Verlaine Metz, LICM Grp Capteurs, F-57078 Metz 3, France

[2] Delft Univ Technol, Delft Inst Sustainable Energy, NL-2628 BL Delft, Netherlands

来源：

APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 18期

关键词：

zinc oxide; electrostatic spray deposition; gas sensors; NO2;

D O I：

10.1016/j.apsusc.2007.03.039

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this work, thin films of zinc oxide (ZnO) for gas-sensor applications were deposited on platinum coated alumina substrate, using electrostatic spray deposition (ESD) technique. As precursor solution zinc acetate in ethanol was used. Scanning electron microscopy (SEM) evaluation showed a porous and homogeneous film morphology and the energy dispersive X-ray analysis (EDX) confirmed the composition of the films with no presence of other impurities. The microstructure studied with X-ray diffraction (XRD) and Raman spectroscopy indicated that the ZnO oxide films are crystallized in a hexagonal wurtzite phase. The films showed good sensitivity to I ppm nitrogen dioxide (NO2) at 300 degrees C while a much lower sensitivity to 12 ppm hydrogen sulphide (H2S). (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：7483 / 7489

页数：7

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