Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting

The fundamental issues on the smallest possible processing accuracy and the best feasible surface smoothness in pinpoint polymerization-based laser fabrication were experimentally investigated. The lateral spatial resolution is improved from the previously reported value, 120 nm, to around 100 nm by intentionally introducing radical quenchers in the resin. The roughness measured from 10 mum x 10 mum surface areas were averaged to 4-11 nm, which is found slightly affected by the laser pulse energy but independent on the scanning pitch when it is smaller than a critical value. The surface quality of this level could fully satisfy the requirement of various photonic elements and devices. (C) 2005 American Institute of Physics.