Femtosecond laser-induced microstructures in glasses and applications in micro-optics

被引:51
作者
Qiu, JR [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Photon Craft Project, Kyoto 6190237, Japan
[2] Japan Sci & Technol Agcy, Kyoto 6190237, Japan
关键词
femtosecond laser; glass; structure; modification; waveguide;
D O I
10.1002/tcr.20006
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Femtosecond laser has been widely used in microscopic modifications to materials due to its ultra-short laser pulse and ultrahigh light intensity. When a transparent material e.g. glass is irradiated by a tightly focused femtosecond laser, the photo-induced reaction is expected to occur only near the focused part of the laser beam inside the glass due to the multiphoton processes. We observed various induced structures e.g. color center defects, refractive index change, micro-void and micro-crack, in glasses after the femtosecond laser irradiation. In this paper, we review the femtosecond laser induced phenomena and discuss the mechanisms of the observed phenomena. We also introduce the fabrication of various micro-optical components, e.g. optical waveguide, micro-grating, micro-lens, fiber attenuator, 3-dimensional optical memory by using the femtosecond laser-induced structures. The femtosecond laser will open new possibilities in the fabrication of micro-optical components with various optical functions. (C)2004 The Japan Chemical Journal Forum and Wiley Periodicals, Inc.
引用
收藏
页码:50 / 58
页数:9
相关论文
共 36 条
[1]  
Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637
[2]   Writing waveguides in glass with a femtosecond laser [J].
Davis, KM ;
Miura, K ;
Sugimoto, N ;
Hirao, K .
OPTICS LETTERS, 1996, 21 (21) :1729-1731
[3]   Three-dimensional optical storage inside transparent materials [J].
Glezer, EN ;
Milosavljevic, M ;
Huang, L ;
Finlay, RJ ;
Her, TH ;
Callan, JP ;
Mazur, E .
OPTICS LETTERS, 1996, 21 (24) :2023-2025
[4]   PHOTOSENSITIVITY IN OPTICAL FIBER WAVEGUIDES - APPLICATION TO REFLECTION FILTER FABRICATION [J].
HILL, KO ;
FUJII, Y ;
JOHNSON, DC ;
KAWASAKI, BS .
APPLIED PHYSICS LETTERS, 1978, 32 (10) :647-649
[5]  
HIRAO K, 1995, CERAM JPN, V30, P689
[6]   Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses [J].
Homoelle, D ;
Wielandy, S ;
Gaeta, AL ;
Borrelli, NF ;
Smith, C .
OPTICS LETTERS, 1999, 24 (18) :1311-1313
[7]   Fundamentals of high-energy electron-irradiation-induced modifications of silicate glasses [J].
Jiang, N ;
Qiu, JR ;
Ellison, A ;
Silcox, J .
PHYSICAL REVIEW B, 2003, 68 (06)
[8]   Nanoscale modification of optical properties in Ge-doped SiO2 glass by electron-beam irradiation [J].
Jiang, N ;
Qiu, JR ;
Gaeta, AL ;
Silcox, J .
APPLIED PHYSICS LETTERS, 2002, 80 (11) :2005-2007
[9]   Precipitation of nanometer scale Zn crystalline particles in ZnO-B2O3-SiO2 glass during electron irradiation [J].
Jiang, N ;
Qiu, JR ;
Silcox, J .
APPLIED PHYSICS LETTERS, 2000, 77 (24) :3956-3958
[10]  
JIANG N, 2002, PHYS REV B, V60, P2263