Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

被引：5

作者：

Onoe, H ^{[1
]}

Gel, M ^{[1
]}

Hoshino, K ^{[1
]}

Matsumoto, K ^{[1
]}

Shimoyama, I ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Informat Sci & Technol, Tokyo, Japan

来源：

MEMS 2005 Miami: Technical Digest | 2005年

关键词：

D O I：

10.1109/MEMSYS.2005.1453856

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO2 flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.

引用

页码：16 / 19

页数：4

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