Development of a multifunctional surface analysis system based on a nanometer scale scanning electron beam: Combination of ultrahigh vacuum-scanning electron microscopy, scanning reflection electron microscopy, Auger electron spectroscopy, and x-ray photoelectron spectroscopy

被引:55
作者
Watanabe, H
Ichikawa, M
机构
[1] Jt. Res. Center for Atom Technology, Angstrom Technology Partnership, c/o Natl. Inst. Adv. Interdisc. Res., Tsukuba, Ibaraki 305
关键词
D O I
10.1063/1.1147567
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed a multifunctional surface analysis system based on a scanning electron beam for nanofabrication and characterization of surface reactions for fabrication processes. The system performs scanning electron microscopy (SEM), scanning reflection electron microscopy (SREM); Auger electron spectroscopy (AES), and x-ray photoelectron spectroscopy. Nanometer scale resolution is obtained for ultrahigh vacuum (UHV)-SEM while the mechanical pumping instruments are operated. Single atomic steps on Si(111) surfaces are observed through SREM. Surface sensitive AES measurement is achieved with SREM geometry; this has a great advantage for investigating atomic step related surface reactions. High spatial resolution AES analysis is also achieved by using a nanometer scale probe beam. Auger electron signals from a hundred Ag atoms on a Si(111) surface are successfully detected with high sensitivity. (C) 1996 American Institute of Physics.
引用
收藏
页码:4185 / 4190
页数:6
相关论文
共 7 条
  • [1] ELECTRON-BEAM FABRICATION OF 80-A METAL STRUCTURES
    BROERS, AN
    MOLZEN, WW
    CUOMO, JJ
    WITTELS, ND
    [J]. APPLIED PHYSICS LETTERS, 1976, 29 (09) : 596 - 598
  • [2] ENDO A, 1993, SURF SCI, V293, P265
  • [3] ICHIKAWA M, 1988, NATO ASI SER, V188, P343
  • [4] SCANNING REFLECTION ELECTRON-MICROSCOPY AND ASSOCIATED TECHNIQUES FOR SURFACE STUDIES
    LIU, J
    COWLEY, JM
    [J]. ULTRAMICROSCOPY, 1993, 48 (04) : 381 - 416
  • [5] NANOMETER-RESOLUTION SURFACE-ANALYSIS WITH AUGER ELECTRONS
    LIU, J
    HEMBREE, GG
    SPINNLER, GE
    VENABLES, JA
    [J]. ULTRAMICROSCOPY, 1993, 52 (3-4) : 369 - 376
  • [6] ELECTRON-BEAM INDUCED SELECTIVE ETCHING AND DEPOSITION TECHNOLOGY
    MATSUI, S
    ICHIHASHI, T
    MITO, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (05): : 1182 - 1190
  • [7] VERTICALLY SELF-ORGANIZED INAS QUANTUM BOX ISLANDS ON GAAS(100)
    XIE, QH
    MADHUKAR, A
    CHEN, P
    KOBAYASHI, NP
    [J]. PHYSICAL REVIEW LETTERS, 1995, 75 (13) : 2542 - 2545