Polarization interferometer for measuring small displacement

被引:37
作者
Liu, XQ [1 ]
Clegg, W
Jenkins, DFL
Liu, B
机构
[1] Univ Plymouth, Ctr Res Informat Storage Technol, Plymouth PL4 8AA, Devon, England
[2] Data Storage Inst, Singapore, Singapore
关键词
displacement measurement; dual-beam; high-speed; homodyne interferometer; polarization interferometer; sub-nanometer;
D O I
10.1109/19.948290
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A homodyne polarization laser interferometer is presented for high-speed measurement of small displacements. No modulation technique is used, so the opto-mechanical setup is relatively simple. The dual-beam arrangement enables the displacement to be measured while the use of polarization interferometry enables the determination of the directional nature of the displacement. Another feature of this interferometer lies in the fact that it is also suitable for the measurement of head-media spacing of a hard disk drive. Combined with the electronics used at present, sub-nanometer resolution is achievable. Its measurement bandwidth is limited only by the sampling rate of the A/D board being used.
引用
收藏
页码:868 / 871
页数:4
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