Humidity sensitive properties of nanostructured Al-doped ZnO:TiO2 thin films

被引：45

作者：

Tai, WP ^{[1
]}

Kim, JG

Oh, JH

机构：

[1] Inha Univ, Inst Adv Mat, Inchon 402751, South Korea

[2] Inha Univ, Sch Mat Sci & Engn, Inchon 402751, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 96卷 / 03期

基金：

新加坡国家研究基金会;

关键词：

humidity sensor; nanostructure; bilayered film;

D O I：

10.1016/S0925-4005(03)00602-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Nanostructured Al-doped ZnO(AZ):TiO2 films are prepared using a sol-gel process and the humidity sensitive properties of the films are investigated. The films possess nanostructure. Nanostructured-bilayered TiO2/AZ film exhibits improved linearity with narrow hysteresis loop in the resistance variation for relative humidity than single layered film. The resistance of the bilayered TiO2/AZ film changes by nearly three orders of magnitude during the relative humidity variation of 30-90%. The humidity sensitive properties in the nanostructured AZ:TiO2 films are discussed. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：477 / 481

页数：5

共 36 条

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