Miniature planar solid immersion mirror with focused spot less than a quarter wavelength

被引：47

作者：

Challener, WA

Mihalcea, C

Peng, CB

Pelhos, K

机构：

[1] Seagate Technology, Pittsburgh, PA

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 18期

关键词：

D O I：

10.1364/OPEX.13.007189

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a microoptical planar waveguide solid immersion mirror with high optical throughput, and show that it can focus light to spot sizes of similar to 90 nm at a wavelength of 413 nm. Scanning near field optical microscope images of the light within the device are in good agreement with a simple theoretical model. This device is accurately mass-produced with lithographic and thin film deposition techniques known from modern integrated circuit processing. (c) 2005 Optical Society of America

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页码：7189 / 7197

页数：9

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