Numerical simulation of low-Mach number gas mixture flows with heat and mass transfer using unstructured grids

被引:16
作者
Egorov, YE
Zhmakin, AI
机构
[1] Univ Erlangen Nurnberg, Fluid Mech Inst, D-91058 Erlangen, Germany
[2] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
关键词
finite-volume method; unstructured grid; Navier-Stokes equations; low-Mach number flow; heat and mass transfer; compound semiconductors; metal-organic chemical vapour deposition;
D O I
10.1016/S0927-0256(98)00005-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A mathematical model and a numerical algorithm have been developed for the numerical prediction of 2-D plane and axisymmetrical rotational viscous gas mixture flows inside highly heated modem engineering devices like chemical vapor deposition (CVD) reactors. The model formulated is valid for arbitrary temperature and mixture composition differences, induced by an intensive heat and mass transfer, as well as for buoyancy effects. Radiative heat exchange between different solid parts through a non-participating gas, conjugated heat transfer inside solid blocks, and heterogeneous chemical transformations with solid film deposition are also accounted for. The numerical algorithm has been constructed on the basis of finite-volume approximations on unstructured grids. After the detailed testing on a set of sample problems, the capabilities of the present version of the computer code DRUG-2D (Digital Researcher on Unstructured Grid) are illustrated by the first numerical results for the real complex flow inside the CVD Planetary Reactor(TM). (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:204 / 220
页数:17
相关论文
共 10 条
[1]   LAYER UNIFORMITY IN A MULTIWAFER MOVPE REACTOR FOR III-V COMPOUNDS [J].
FRIJLINK, PM ;
NICOLAS, JL ;
SUCHET, P .
JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) :166-174
[2]  
Hirschfelder J. O., 1967, MOL THEORY GASES LIQ
[3]   FINITE VOLUME MULTIGRID PREDICTION OF LAMINAR NATURAL-CONVECTION - BENCH-MARK SOLUTIONS [J].
HORTMANN, M ;
PERIC, M ;
SCHEUERER, G .
INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN FLUIDS, 1990, 11 (02) :189-207
[4]  
JENSEN KF, 1991, ANNU REV FLUID MECH, V23, P197, DOI 10.1146/annurev.fl.23.010191.001213
[5]   Numerical study of grey-body surface radiation coupled with fluid flow for general geometries using a finite volume multigrid solver [J].
Kadinski, L ;
Peric, M .
INTERNATIONAL JOURNAL OF NUMERICAL METHODS FOR HEAT & FLUID FLOW, 1996, 6 (03) :3-18
[6]   LAMINAR-FLOW IN A COMPLEX-GEOMETRY - A COMPARISON [J].
NAPOLITANO, M ;
ORLANDI, P .
INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN FLUIDS, 1985, 5 (08) :667-683
[7]  
Oran ES, 2001, Numerical simulation of reactive flow
[8]  
Patankar S.V., 1980, Numerical Heat Transfer and Fluid-Flow, DOI 10.1201/9781482234213
[9]  
RHIE CM, 1983, AIAA J, V21, P1525, DOI 10.2514/3.8284
[10]  
THOMADAKIS M, 1994, COMPUTATIONAL FLUID, P325