Catalytic growth of silicon nanowires assisted by laser ablation

被引:86
作者
Yang, YH
Wu, SJ
Chin, HS
Lin, PI
Chen, YT
机构
[1] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan
[2] Natl Taiwan Univ, Dept Chem, Taipei 106, Taiwan
关键词
D O I
10.1021/jp030663d
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Silicon nanowires (SiNWs, diameter greater than or equal to 5 nm, and length similar to mum) have been fabricated with metal- and SiO2-catalyses assisted by laser ablation. In the catalytic growth of single-crystalline SiNWs by pure metal catalysts (Fe, Ru, and Pr), Si {111} is found to be the most stable plane and wire growth axis is along <111>. The growth mechanism follows a vapor-liquid-solid process, and the synthesized SiNWs typically have metal-tips composed of metal and Si, such as FeSi2, RuSi3, and PrSi4, respectively. In sharp contrast, a crystalline growth axis of <111> and a wire growth axis of <112> are the result in the SiNWs catalyzed by SiO2. Besides, the SiO2-catalytic SiNWs generally have no tips at the wire ends. Distinctive growth mechanisms resulting from metal- and SiO2-catalyses will be discussed. Pressure effect on the longitudinal and transverse growing rates in the fabrication of SiNWs has been examined.
引用
收藏
页码:846 / 852
页数:7
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