Preparation of La0.5Sr0.5CoO3 powders and thin film from a new aqueous solution-gel precursor

被引:11
作者
Pagnaer, J
Hardy, A
Mondelaers, D
Vanhoyland, G
D'Haen, J
Van Bael, MK
Van den Rul, H
Mullens, J
Van Poucke, LC
机构
[1] Limburgs Univ Ctr, IMO, Lab Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium
[2] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2005年 / 118卷 / 1-3期
关键词
aqueous; electrode material; thin films; spin coating;
D O I
10.1016/j.mseb.2004.12.017
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports on the spin deposition of LSCO thin films on a SiO2/Si substrate by a new aqueous solution-gel route. Stable and monometallic precursor solutions are prepared from common and inexpensive oxides or hydroxides. The aqueous La3+ precursor is synthesized by reaction of La2O3 with citric acid. In order to prepare an aqueous Sr2+ precursor Sr(OH)(2) is complexed by EDTA. The new peroxo citrato CO2+ precursor is synthesized by reaction of Co(OH)(2) with hydrogen peroxide in an aqueous solution of citric acid. Mixing the individual precursors in stoichiometric quantities results in a clear and stable aqueous LSCO precursor solution. Evaporation of water transforms this solution in an amorphous gel that is homogeneous down to nanometer scale. In situ high temperature X-ray diffraction analysis of the gel reveals that phase pure LSCO powder is formed at 550 degrees C without detection of any intermediate crystalline phase. Spin deposition and crystallization at 625 degrees C in pure O-2 of this aqueous precursor solution resulted in a phase pure conductive LSCO thin film. The sheet resistance of this thin film amounted to 235 ohm/sq. Since the thickness of the film is 120 nm, the specific resistivity was calculated to be 2.8 m ohm cm at room temperature. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:79 / 83
页数:5
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