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pH sensitivity of nanocrystalline diamond films

被引：11
作者：
Christiaens, P.
Abouzar, M. H.
Poghossian, A.
Wagner, T.
Bijnens, N.
Williams, O. A.
Daenen, M.
Haenen, K.
Douheret, O.
D'Haen, J.
Mekhalif, Z.
Schoening, M. J.
Wagner, P.
机构：
[1] Hasselt Univ, Mat Res Inst, B-3590 Diepenbeek, Belgium
[2] IMEC vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium
[3] Aachen Univ Appl Sci, Inat Nao & Biotechnol IBN 2, D-52428 Julich, Germany
[4] Res Ctr Julich GmbH, Inst Bio & Nanosyst, D-52425 Julich, Germany
[5] Fac Univ Notre Dame Paix, Lab Chem & Electrochem Surfaces, B-5000 Namur, Belgium
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2007年 / 204卷 / 09期
关键词：
D O I：
10.1002/pssa.200776326
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The pH-sensitive properties of hydrogen- and oxygen-terminated nanocrystalline diamond (NCD) films have been investigated using a field-effect-based capacitive electrolyte-diamond-insulator-semiconductor (EDIS) structure as transducer. The NCD thin films (100-500 nm) were grown on p-Si-SiO2 Substrates by microwave plasma-enhanced chemical vapour deposition. The electrochemical characterisation of EDIS sensors with NCD films of different thicknesses has been performed in buffer solutions of pH 3 to pH 11 by means of capacitance-voltage and constant-capacitance methods. The developed EDIS sensors with O-terminated NCD surfaces show an average pH-sensitivity of 38 mV/pH A slightly smaller pH-sensitivity of 29-36 mV/pH was observed for the EDIS structure with H-terminated NCD surfaces. (C) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：2925 / 2930
页数：6
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