Excimer laser use for microetching computer-generated holographic structures

被引:47
作者
Vainos, NA [1 ]
Mailis, S [1 ]
Pissadakis, S [1 ]
Boutsikaris, L [1 ]
Parmiter, PJM [1 ]
Dainty, P [1 ]
Hall, TJ [1 ]
机构
[1] UNIV LONDON KINGS COLL,DEPT ELECT & ELECT ENGN,LONDON WC2R 2LS,ENGLAND
来源
APPLIED OPTICS | 1996年 / 35卷 / 32期
关键词
computer-generated holograms; optical interconnects; micro-optics; excimer laser; materials; processing;
D O I
10.1364/AO.35.006304
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Excimer-laser microetching of a variety of materials is applied to the fabrication of surface-relief optical microstructures of arbitrary morphology, with particular emphasis on computer-generated holographic structures. High-definition, high-radiation-intensity selective laser ablative etching in conjunction with step-and-repeat (period) replication or raster (pixel) scanning is used. To support such developments, the characteristic etching properties of a wide range of solid materials, from metals to semiconductors and polymers, are studied. Optical-interconnect and generic object holograms are produced by means of this alternative one-step holographic information-recording method. (C) 1996 Optical Society of America
引用
收藏
页码:6304 / 6319
页数:16
相关论文
共 44 条
[11]  
Dammann H., 1971, Optics Communications, V3, P312, DOI 10.1016/0030-4018(71)90095-2
[12]   INVESTIGATION OF COMPUTER-GENERATED DIFFRACTIVE BEAM SHAPERS FOR FLATTENING OF SINGLE-MODAL CO2-LASER BEAMS [J].
DUPARRE, M ;
GOLUB, MA ;
LUDGE, B ;
PAVELYEV, VS ;
SOIFER, VA ;
USPIENIEV, GV ;
VOLOTOVSKII, SG .
APPLIED OPTICS, 1995, 34 (14) :2489-2497
[13]  
*EUR STRAT PROGR R, 1993, D2 ESPRIT COMM EUR U
[14]   ITERATIVE ENCODING OF HIGH-EFFICIENCY HOLOGRAMS FOR GENERATION OF SPOT ARRAYS [J].
FELDMAN, MR ;
GUEST, CC .
OPTICS LETTERS, 1989, 14 (10) :479-481
[15]   FABRICATION OF CONTINUOUS-RELIEF MICRO-OPTICAL ELEMENTS BY DIRECT LASER WRITING IN PHOTORESISTS [J].
GALE, MT ;
ROSSI, M ;
PEDERSEN, J ;
SCHUTZ, H .
OPTICAL ENGINEERING, 1994, 33 (11) :3556-3566
[16]  
GOLTSOS W, 1990, OPT ENG, V29, P1392, DOI 10.1117/12.55743
[17]  
Hanyu I., 1990, Proceedings of the SPIE - The International Society for Optical Engineering, V1264, P167, DOI 10.1117/12.20187
[18]  
Herzig H.P., 1991, INT TRENDS OPTICS, P57
[19]   FABRICATION OF SINGLE-CRYSTAL DIAMOND MICROCOMPONENTS [J].
HUNN, JD ;
WITHROW, SP ;
WHITE, CW ;
CLAUSING, RE ;
HEATHERLY, L ;
CHRISTENSEN, CP .
APPLIED PHYSICS LETTERS, 1994, 65 (24) :3072-3074
[20]   PLANAR INTEGRATION OF FREE-SPACE OPTICAL-COMPONENTS [J].
JAHNS, J ;
HUANG, A .
APPLIED OPTICS, 1989, 28 (09) :1602-1605