Electron emission properties of Spindt-type platinum field emission cathodes

被引:39
作者
Gotoh, Y [1 ]
Nagao, M
Nozaki, D
Utsumi, K
Inoue, K
Nakatani, T
Sakashita, T
Betsui, K
Tsuji, H
Ishikawa, J
机构
[1] Kyoto Univ, Dept Elect Sci & Engn, Sakyo Ku, Kyoto 6068501, Japan
[2] Fujitsu Labs Inc, Akashi, Hyogo 6748555, Japan
关键词
D O I
10.1063/1.1635655
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electron emission properties of Spindt-type platinum field emission cathodes were investigated. The current-voltage characteristics together with the current fluctuation during long term operation were evaluated in ultrahigh vacuum. The changes of the emission properties in hydrogen, oxygen or carbon monoxide gas ambient were also investigated. Significant improvement of the emission properties was found when the cathode was operated in carbon monoxide ambient under a certain condition. It was found that the effect of the improvement lasted at least 200 h, and resistance against the oxygen exposure was also improved. The changes of the electron emission properties during long term operation in ultrahigh vacuum and in gas ambient were analyzed with the Seppen-Katamuki chart, of which ordinate and abscissa are slope and intercept of Fowler-Nordheim plot. The electron emission properties were distributed along a straight line in the Seppen-Katamuki chart, and those of the cathode improved by carbon monoxide exposure were distributed along another line. The deviation of the electron emission property in ultrahigh vacuum was considered to be due to change in the geometry of the emitting surface. The major reason for the modification of electron emission properties in carbon monoxide ambient was considered to be deposition of carbon onto the emitting surface, resulting in reduction of the work function. From the deviation of the Fowler-Nordheim characteristics in the Seppen-Katamuki chart, we presented an empirical equation for field emission. (C) 2004 American Institute of Physics.
引用
收藏
页码:1537 / 1549
页数:13
相关论文
共 51 条
[41]  
NAKAMURA K, 2003, 50 SPRING M JAP SOC, P817
[42]  
Nakatani T., 1996, P 3 INT DISPL WORKSH, P127
[43]   ELECTRIC FIELD-POTENTIAL CORRELATION FACTORS FOR FIELD-EMISSION MICROTRIODES [J].
NICOLAESCU, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02) :531-535
[44]   ELECTRON-EMISSION ENHANCEMENT BY OVERCOATING MOLYBDENUM FIELD-EMITTER ARRAYS WITH TITANIUM, ZIRCONIUM, AND HAFNIUM [J].
SCHWOEBEL, PR ;
SPINDT, CA ;
BRODIE, I .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02) :338-343
[45]   FIELD-EMITTER ARRAYS FOR VACUUM MICROELECTRONICS [J].
SPINDT, CA ;
HOLLAND, CE ;
ROSENGREEN, A ;
BRODIE, I .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) :2355-2363
[46]   PHYSICAL-PROPERTIES OF THIN-FILM FIELD-EMISSION CATHODES WITH MOLYBDENUM CONES [J].
SPINDT, CA ;
BRODIE, I ;
HUMPHREY, L ;
WESTERBERG, ER .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5248-5263
[47]  
SPINDT CA, 2001, SPINDT FIELD EMITTER
[48]   NOISE IN FIELD EMISSION DIODES [J].
TIMM, GW ;
VANDERZI.A .
PHYSICA, 1966, 32 (07) :1333-&
[49]  
UTSUMI K, UNPUB
[50]  
WATANABE M, 2000, 3 INT VAC EL SOURC C, pF3