Coherent anti-stokes Raman scattering microspectroscopy of silicon components with a photonic-crystal fiber frequency shifter

被引：14

作者：

Mitrokhin, V. P. ^{[1
]}

Fedotov, A. B. ^{[1
,2
]}

Ivanov, A. A. ^{[1
,3
]}

Alfimov, M. V. ^{[3
]}

Zheltikov, A. M. ^{[1
,2
]}

机构：

[1] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119992, Russia

[2] Moscow MV Lomonosov State Univ, Ctr Int Laser, Moscow 119992, Russia

[3] Russian Acad Sci, Ctr Photochem, Moscow 117421, Russia

来源：

OPTICS LETTERS | 2007年 / 32卷 / 23期

关键词：

D O I：

10.1364/OL.32.003471

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Coherent anti-Stokes Raman scattering (CARS) microspectroscopy of silicon components is demonstrated with pump and probe fields delivered by a mode-locked Cr:forsterite laser and the frequency-shifted soliton output of a photonic-crystal fiber as a Stokes field. CARS microspectroscopy is shown to allow a visualization of microscale features and defects on the surface of silicon wafers, offering much promise for online diagnostics of electronic and photonic silicon chip components. (c) 2007 Optical Society of America.

引用

页码：3471 / 3473

页数：3

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