Direct optical measurement of the valence band offset of p+Si1-x-yGexCy/p-Si(100) by heterojunction internal photoemission

被引:10
作者
Chang, CL [1 ]
Rokhinson, LP [1 ]
Sturm, JC [1 ]
机构
[1] Princeton Univ, Ctr Photon & Optoelect Mat, Dept Elect Engn, Princeton, NJ 08544 USA
关键词
D O I
10.1063/1.122809
中图分类号
O59 [应用物理学];
学科分类号
摘要
Optical absorption measurements have been performed to study the effect of substitutional carbon on the valence band offset of compressively strained p(+) Si1-x-yGexCy/(100) p(-) Si. The compressively strained p(+) Si1-x-yGexCy/(100) p(-) Si heterojunction internal photoemission structures were grown by rapid thermal chemical vapor deposition with substitutional carbon levels up to 2.5%. Carbon decreased the valence band offset by 26 +/- 1 meV/% substitutional carbon. Based on previous reports of the effect of carbon on the band gap of Si1-x-yGexCy, our work suggests that the effect of carbon incorporation on the band alignment of compressively strained Si1-x-yGexCy/Si is to reduce the valence band offset, with a negligible effect on the conduction band alignment. (C) 1998 American Institute of Physics. [S0003-6951(68)04150-3].
引用
收藏
页码:3568 / 3570
页数:3
相关论文
共 19 条
[1]   BAND-EDGE AND DEEP-LEVEL PHOTOLUMINESCENCE OF PSEUDOMORPHIC SI1-X-YGEXCY ALLOYS [J].
BOUCAUD, P ;
FRANCIS, C ;
JULIEN, FH ;
LOURTIOZ, JM ;
BOUCHIER, D ;
BODNAR, S ;
LAMBERT, B ;
REGOLINI, JL .
APPLIED PHYSICS LETTERS, 1994, 64 (07) :875-877
[2]   Growth of Si1-x-yGexCy multi-quantum wells: Structural and optical properties [J].
Boucaud, P ;
Guedj, C ;
Julien, FH ;
Finkman, E ;
Bodnar, S ;
Regolini, JL .
THIN SOLID FILMS, 1996, 278 (1-2) :114-117
[3]   Spatially indirect radiative recombination of carriers localized in Si1-x-yGexCy/Si1-yCy double quantum well structure on Si substrates [J].
Brunner, K ;
Winter, W ;
Eberl, K .
APPLIED PHYSICS LETTERS, 1996, 69 (09) :1279-1281
[4]   Near-band-edge photoluminescence from pseudomorphic Si1-gamma C gamma/Si quantum well structures [J].
Brunner, K ;
Eberl, K ;
Winter, W .
PHYSICAL REVIEW LETTERS, 1996, 76 (02) :303-306
[5]   Effect of carbon on the valence band offset of Si1-x-yGexCy/Si heterojunctions [J].
Chang, CL ;
StAmour, A ;
Sturm, JC .
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :257-260
[6]   The effect of carbon on the valence band offset of compressively strained Si1-x-yGexCy/(100) Si heterojunctions [J].
Chang, CL ;
StAmour, A ;
Sturm, JC .
APPLIED PHYSICS LETTERS, 1997, 70 (12) :1557-1559
[7]  
CHANG CL, IN PRESS THIN SOLID
[8]  
CHANG CL, 1995, MATER RES SOC S P, V402, P437
[9]   GROWTH AND STRAIN COMPENSATION EFFECTS IN THE TERNARY SI1-X-YGEXCY ALLOY SYSTEM [J].
EBERL, K ;
IYER, SS ;
ZOLLNER, S ;
TSANG, JC ;
LEGOUES, FK .
APPLIED PHYSICS LETTERS, 1992, 60 (24) :3033-3035
[10]   X-ray photoelectron spectroscopic evaluation of valence band offsets for strained Si1-xGex, Si1-yCy, and Si1-x-yGexCy on Si(001) [J].
Kim, M ;
Osten, HJ .
APPLIED PHYSICS LETTERS, 1997, 70 (20) :2702-2704