Fabrication of continuous surface-relief gratings using a high-precision diamond-cutting process

被引:2
作者
Amako, J
Nakao, H
Ochiai, S
机构
[1] Seiko Epson Corp, Prod Engn & Dev Dept, Nagano 3990295, Japan
[2] Shimada Precis Co Ltd, Dept Engn, Fushimi Ku, Kyoto 6128437, Japan
关键词
diffractive optics; continuous relief; diamond cutting; springback; roughness;
D O I
10.1117/1.1370386
中图分类号
O43 [光学];
学科分类号
070207 [光学]; 0803 [光学工程];
摘要
Direct fabrication of continuous surface-relief gratings on acrylics using a high-precision diamond-cutting process is reported. Critical conditions such as the diamond-tip radius and cutting step were selected by taking account of a designed grating profile and an expected roughness on the obtained grating surface: Experimental results for a 13-fanout continuous phase grating are presented. The phase profile was optimized using a stochastic design algorithm. A 3-mm-thick acrylic plate was carved into a grating that provided a measured efficiency of 85% with Fresnel reflection losses uncorrected. The diffracted intensity distribution was rather sensitive to any departure from the designed profile, the 0th-order intensity being particularly affected. Compensating the material's springback was found critical to the grating's performance. (C) 2001 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码:1456 / 1463
页数:8
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