A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing

被引：137

作者：

Arana, LR

Schaevitz, SB

Franz, AJ

Schmidt, MA

Jensen, KF

机构：

[1] MIT, Dept Chem Engn, Cambridge, MA 02139 USA

[2] MIT, Dept Elect Engn & Comp Sci, Microsyst Technol Labs, Cambridge, MA 02139 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2003年 / 12卷 / 05期

关键词：

chemical reactor; energy; fuel processing; heat exchanger; hydrogen;

D O I：

10.1109/JMEMS.2003.817897

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a suspended-tube chemical reactor/heat exchanger for high-temperature fuel processing in micro energy conversion systems, primarily for hydrogen production in portable fuel cell systems. This reactor, designed to thermally isolate a high-temperature reaction zone, consists of four free-standing silicon nitride tubes comprising two independent U-shaped fluidic channels. Portions of the tubes are encased in silicon to enable heat exchange between the fluids in these channels. A thin-film platinum resistor is embedded for localized heating and temperature sensing. This paper describes the design and fabrication process for the MEMS fuel processor. Fluidic testing, thermal characterization up to 825 degreesC, and preparation of catalyst washcoats in the reactor microchannels are discussed. In addition, results from catalytic autothermal butane combustion and ammonia cracking in the reactor are presented.

引用

页码：600 / 612

页数：13

共 30 条

[1]

ATKINS PW, 1994, PHYSICAL CHEM

[2]

CHANGRANI R, 2001, S ACS DIV FUEL CHEM, V46, P476

[3]

COMINOS V, 2002, P 6 INT C MICR TECHN, P113

[4] Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus [J].