Effect of pyrolysis temperature on the characteristics of PZT films deposited by the sol-gel method

We have studied the effect of pyrolysis temperatures between 300 and 600 degrees C on the materials and ferroelecrric characteristics of PZT films deposited by the sol-gel method. SEM showed that the grain size increased slightly with the pyrolysis temperature. X-ray diffraction showed that the texture was mainly [111] orientation for pyrolysis temperatures below 400 degrees C, but changed to [100] orientation for pyrolysis temperatures at or above 400 degrees C. Pyrochlore phases also existed in films pyrolyzed at temperatures above 400 degrees C. At a final annealing temperature of 700 degrees C for 10 min, the remanent polarization P-r has a maximum value at 400 degrees C pyrolysis temperature. Lf the annealing time was elongated, the value of P-r for films pyrolyzed at higher temperatures could be increased. (C) 1998 Elsevier Science S.A. All rights reserved.