The future for electroplating electro-magnetic materials in microelectronics

被引：18

作者：

Celis, JP

Cavallotti, P

Da Silva, JM

Zielonka, A

机构：

[1] Katholieke Univ Leuven, Dept MTM, B-3001 Louvain, Belgium

[2] Politecn Milan, Dipartimento Chim Fis Applicata, I-20131 Milan, Italy

[3] Univ Porto, Ctr Fis Mat, P-4150 Porto, Portugal

[4] Forschungsinst Edelmet & Met Chem, D-73525 Schwabisch Gmund, Germany

来源：

TRANSACTIONS OF THE INSTITUTE OF METAL FINISHING | 1998年 / 76卷

关键词：

D O I：

10.1080/00202967.1998.11871217

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Electroplating is a common long-standing industrial technique for the mass production of functional coatings in industry. Recent interest in and needs for coatings and materials having unique properties have initiated a renewed interest in the so-called 'advanced' electroplating In this paper, the functional properties of a number of recently developed compositionally modulated electroplated materials are presented and some of their potential applications in microelectronics are introduced.

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页码：163 / 170

页数：8

相关论文

共 24 条

[1] GROWTH AND CHARACTERIZATION OF ELECTRODEPOSITED CU/CU-NI-CO ALLOY SUPERLATTICES [J].

ALPER, M ;

APLIN, PS ;

ATTENBOROUGH, K ;

DINGLEY, DJ ;

HART, R ;

LANE, SJ ;

LASHMORE, DS ;

SCHWARZACHER, W .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1993, 126 (1-3) :8-11

[2] MAGNETORESISTANCE IN ELECTRODEPOSITED NI-FE-CU/CU MULTILAYERS [J].

ATTENBOROUGH, K ;

HART, R ;

LANE, SJ ;

ALPER, M ;

SCHWARZACHER, W .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 148 (1-2) :335-336

[3] ELECTRODEPOSITED CO-PT THIN-FILMS FOR MAGNETIC HARD DISKS [J].

BOZZINI, B ;

DEVITA, D ;

SPORTOLETTI, A ;

ZANGARI, G ;

CAVALLOTTI, PL ;

TERRENZIO, E .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1993, 120 (1-3) :300-304

[4]

BOZZINI B, 1993, MAGNETIC MAT PROCESS, P69

[5]

Brenner A., 1963, ELECTRODEPOSITION AL

[6] MAGNETOOPTICAL DELTA-M MEASUREMENTS OF INTERACTIONS IN ELECTROPLATED COPT FILMS [J].

CALLEGARO, L ;

PUPPIN, E ;

CAVALLOTTI, PL ;

LECIS, N ;

ZANGARI, G .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (01) :457-459

[7] Electrodeposition of magnetic multilayers [J].

Cavallotti, PL ;

Lecis, N ;

Fauser, H ;

Zielonka, A ;

Celis, JP ;

Wouters, G ;

da Silva, JM ;

Oliveira, JMB ;

Sa, MA .

SURFACE & COATINGS TECHNOLOGY, 1998, 105 (03) :232-239

[8]

CAVALLOTTI PL, 1996, ECS P CHIC M MAGN MA, P253

[9] QUANTITATIVE-DETERMINATION OF THROUGH-COATING POROSITY IN THIN CERAMIC PHYSICALLY VAPOR-DEPOSITED COATINGS [J].

CELIS, JP ;

DREES, D ;

MAESEN, E ;

ROOS, JR .

THIN SOLID FILMS, 1993, 224 (01) :58-62

[10] RESIDUAL-STRESS MEASUREMENTS IN ELECTROLYTIC COPPER-NICKEL COMPOSITIONALLY MODULATED MULTILAYERS [J].

CELIS, JP ;

VANACKER, K ;

CALLEWAERT, K ;

VANHOUTTE, P .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (01) :70-74