Preparation of highly oriented thin film exhibiting transparent conduction by the sol-gel process

Highly oriented thin films exhibiting transparent conduction aluminium-doped ZnO (AZO), were prepared by a spin-coating method. The effects of the solvents on the preparation and electrical properties of the thin films were examined. The thin films were formed on quartz glass substrates by spin-coating into a selected solution and calcining at 700 degrees C for 5 h. The thin films had a resistivity of rho(Omega cm)=1.5 after heat treatment in an air atmosphere, and 1.5 x 10(-3) Omega cm in a reducing atmosphere, and a transmission of about 85% in the visible light region. The differences in the high orientation and the conductivities were attributed to a chelate formation in the aluminium-doped ZnO due to the solvent effect.