Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But

被引:17
作者
Blackman, C
Carmalt, CJ
O'Neill, SA
Parkin, IP
Apostilco, L
Molloy, KC
机构
[1] UCL, Dept Chem, London WC1H OAJ, England
[2] Univ Bath, Dept Chem, Bath BA2 7AY, Avon, England
关键词
D O I
10.1039/b105140g
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A facile new method for the preparation of large area titanium phosphide films on glass is described from the atmospheric pressure chemical vapour deposition of titanium tetrachloride and tert-butylphosphine.
引用
收藏
页码:2408 / 2409
页数:2
相关论文
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