Micro-actuator for tera-storage

被引：20

作者：

Hirano, T ^{[1
]}

Fan, LS ^{[1
]}

Semba, T ^{[1
]}

Lee, WY ^{[1
]}

Hong, J ^{[1
]}

Pattanaik, S ^{[1
]}

Webb, P ^{[1
]}

Juan, WH ^{[1
]}

Chan, S ^{[1
]}

机构：

[1] IBM Corp, Div Res, Almaden Res Ctr, San Jose, CA 95120 USA

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746869

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A micro-actuator which can largely improve the capacity and performance of current hard-disk drives (HDDs) was investigated This micro-actuator is located between a slider and a suspension, and moves the magnetic head (attached on the edge of the slider) with very high speed and accuracy. As a result, extremely high data-track density (thus, high capacity) and fast access time can be achieved. First, requirements for this actuator were investigated, and new design methods and fabrication technologies were developed, including area-efficient electrode design, "integrated traces", 20:1 (40 mu m thick, 2 mu m resolution) high-aspect ratio polymer etching, and multi-layer metal structure. The micro-actuator was successfully fabricated and assembled A servo experiment was carried out by using a commercially available 3.5 inch HDD. High servo bandwidth of 2.4 kHz, high track-following accuracy of 0.0275 mu m(one sigma) which enables 25 kilo track-per-inch (TPI), and fast move time of 0.5 mS for 0.8 mu m- seek were demonstrated.

引用

页码：441 / 446

页数：6

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